Facilities

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Cleanroom

Description: The clean room provides an atmosphere with extremely low levels of airborne particles that prevents the contamination thin film ceramic samples during fabrication and storage.

Specifications: Primary working space is provided with air from 4 HEPA filtration units with an air quality of better than class 100. A hood with 2 HEPA filtration units purifying internal clean room air provides an air quality of better than class 10.