Skip navigation, view page content
MSE course syllabi
Materials Science and Engineering 676
Processing of Electronic Materials
Catalog Data:
Introduction to microfabrication with emphasis on processing, structure and stability of materials in microelectronics. Wi Qtr Elective
Prerequisites:
MSE 371 and 543.
Time Distribution:
3-48-minute lectures.
Objectives:
Understanding the basic science and technology of processing microelectronics. Understanding structure-processing relations in microelectronics.
Understanding kinetics, mechanisms, and characterization of microstructure evolution in microfabrication. ABET criteria 3 outcomes (a, b, c, d, e)
Textbooks:
J. D. Plummer, M. D. Deal, and P. B. Griffin, Silicon VLSI Technology - Fundamentals, Practice and Modeling, Prentice Hall 2000.
Supplemental References:
R. C. Jaeger, Introduction to Microelectronic Fabrication, 2nd Edition, Prentice Hall, 2002.
J. W. Mayer and S. Lau, Electronic Materials Science, Macmillan, New York 1990.
S. O. Kasap, Principles of Electrical Engineering Materials and Devices, Irwin Publishing, 2002, Revised Edition.
Lecture Topics :
Introduction and Review (0.5 Week)
Crystal Growth and Defects (0.5 Week)
Lithography and Etching (0.5 Week)
Thermal Oxidation (1 Week)
Solid-State Diffusion (1 Week)
Ion Implantation & Ion-Solid Interactions (1 Week)
Deposition of Thin Films / Epitaxy (1 Week)
Metallization and Solid-Solid Reactions (1 Week)
Device Packaging & Yield (0.5 Week)
MOS Process Integration (1 Week)
Grading Plan:
Every Friday short in-class quiz. Total of quizzes counts 25% of final grade. (The worst quiz will be dropped.)
There will be oral make-up exams for students who have notified the instructor before a Friday absence due to an acceptable reason.
Two take-home exams, each worth 25% of final grade.
10-min presentation on modern processing topics (20%)
Attendance and participation, 5%.
Professional Component Content:
Engineering Science: 2.0 credits or 83%.
Engineering Design: 1.0 credits or 17%.
Design Component Objectives:
Student learn fundamental principles of microelectronic processing with an emphasis on the role of materials structure, properties and stability.
Relation to Program Objectives:
(1) This course provides students with opportunities to learn the basic science and engineering concepts of microfabrication with focus on semiconductor devices.
(2) This course provides students with opportunities to learn about seminal experiments that demonstrate the principles of microfabrication in classroom demonstrations and video clips and to practice the analytical skills to quantify them.
(3) This course provides students with opportunities to understand the relationship between the structure and especially processing and electrical properties of semiconductor devices.
(4) This course prepares students for graduate research and employment in the area of materials engineering with focus on semiconductor materials.
Academic Integrity, Academic Misconduct
Academic misconduct may be found in any action that tends to distort the accurate assessment of any student’s individual accomplishments that are evaluated for the purpose of grading or conferring academic credit. Note that a student may be guilty of academic misconduct, for example, by cheating, collaborating, plagiarizing, or by allowing another student to cheat, collaborate, or plagiarize. Note also that the distortion applies, for example, to exams, homework assignments, and laboratory work. To the extent that any class activity (for example: attendance or participation) is used for evaluation for the purpose of grading or conferring academic credit, falsifying or distorting such activity, or permitting another student to falsify or distort such activity, represents academic misconduct.
Additional guidance about what represents academic integrity and misconduct, and related university-wide policies and procedures are available at the following locations:
http://oaa.osu.edu/coam/faq.html
http://oaa.osu.edu/coam/ten-suggestions.html
Course-specific exceptions or amplifications to the departmental and university statements outlined above will be provided by the faculty instructor in writing, preferably as part of the course syllabus.
Note: Students should not request nor accept guidance on these matters from a teaching assistant, fellow student, or anyone other than the faculty instructor of record for this course.
Disabilities Statement
Any student who feels s/he may need an accommodation based on the impact of a disability should contact the Office for Disability Services at 614-292-3307 in room 150 Pomerene Hall to coordinate reasonable accommodations for students with documented disabilities. (URL: http://www.ods.ohio-state.edu/)
Advice on such matters is also available from the MSE department’s undergraduate adviser (1xx-6xx courses) and graduate coordinator (7xx-9xx courses) whose offices may be found in room 477 Watts Hall.
Megan Daniels, Undergraduate Advisor, (614) 292-3145, e-mail Megan concerning the MSE undergrad studies
Mark Cooper, Graduate Studies Coordinator, (614) 292-7280, e-mail Mark concerning the MSE graduate studies
